TFXRD X-ray Diffraction System for Thin Films —X-ray diffractometer for large-diameter wafers and thin-film evaluation— 2026-01-01

Winter 2026 Volume 42, No. 1

Small-angle X-ray scattering shape metrology for 3D semiconductor devices 2025-01-01

Takumi Goto

Winter 2025 Volume 41, No. 1 - Takumi Goto

Dramatic Improvement in the Throughput of X-ray Topography 2023-07-01

Kenta Shimamoto

Summer 2023 Volume 39, No. 2 - Kenta Shimamoto

Non-destructive Characterization of Crystallographic Defects of SiC Substrates using X-ray Topography for R&D and Quality Assurance in Production 2021-07-01

Christian Reimann and Christian Kranert

Summer 2021 Volume 37, No. 2 - Christian Reimann and Christian Kranert

Machine Learning and Application to Spectral Analysis on TXRF Spectrometry 2021-07-01

Makoto Doi and Shinya Kikuta

Summer 2021 Volume 37, No. 2 - Makoto Doi and Shinya Kikuta

Defect Structure Analysis in Single Crystal Substrates using XRTmicron 2020-07-01

Katsuhiko Inaba

Summer 2020, Volume 36, No. 2 - Katsuhiko Inaba

Evaluation of MEMS device materials by X-ray fluorescence spectrometers for thin films 2020-01-01

Yu Aoki

Winter 2020, Volume 36, No. 1 - Yu Aoki

Development of innovative organic semiconductors driven by state-of-art analytical instruments 2018-07-01

Toshihiro Okamoto

Summer 2018, Volume 34, No. 2 - Toshihiro Okamoto

Benchtop X-ray diffractometer system with molybdenum X-ray source and hybrid photon counting detector -- XtaLAB mini II 2017-01-01

Winter 2017 Volume 33, No. 1

High-throughput, high-resolution X-ray topography imaging system: XRTmicron 2014-01-01

Winter 2014 Volume 30, No. 1

Crystal defects in SiC wafers and a new X-ray topography system 2013-01-01

Kazuhiko Omote

Winter 2013, Volume 29, No. 1 - Kazuhiko Omote

Evaluation of contamination of power semiconductor device wafers by total reflection X-ray fluorescence spectrometer 2013-01-01

Hiroshi Kohno

Winter 2013, Volume 29, No. 1 - Hiroshi Kohno

Total reflection X-ray fluorescence spectrometer TXRF 3800e 2012-01-01

Winter 2012, Volume 28, No. 1